Title :
New fabrication technology of convex and concave microlens using UV curing method
Author :
Park, Eun-Hyun ; Kim, Moon-Jung ; Kwon, Young-Se
Author_Institution :
Dept. of Electr. Eng., Korea Adv. Inst. of Sci. & Technol., Taejon, South Korea
Abstract :
We developed new fabrication technology of convex and concave microlens using UV curing method. The merits of this technology are: (1) high quality microlenses are fabricated by very simple process; (2) microlens radius is easily controlled by varying pedestal size and quantity of injected liquid material; (3) the distance between lens and substrate can be controlled by pedestal height; (4) various shaped microlenses can be formed on same substrate. We believe that this fabrication technology of microlens has wide application as parts for optical system and optical devices
Keywords :
integrated optics; microlenses; optical arrays; optical fabrication; UV curing method; concave microlens; convex microlens; fabrication technology; high quality microlens fabrication; injected liquid material; microlens radius; optical devices; optical system; pedestal height; pedestal size; substrate; Curing; Fabrication; Lenses; Microoptics; Optical devices; Optical fibers; Optical interconnections; Optical materials; Scanning electron microscopy; Shape;
Conference_Titel :
LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-5634-9
DOI :
10.1109/LEOS.1999.811890
