Integrated optical waveguide components fabricated by LIGA technique

Author

Paatzsch, Thomas ; Bauer, Hans-Dieter ; Gaudron, Anne ; Jobst, Britta ; Stadler, Stefan ; Popp, Martin ; Smaglinski, Ingo ; Ehrfeld, Wolfgang

Author_Institution

Inst. fur Mikrotech. Mainz GmbH, Germany

Volume

2

fYear

1999

fDate

1999

Firstpage

645

Abstract

The results presented in this paper clearly show that a combination of precision engineering methods with LIGA is a stable and reproducible fabrication technique to realize polymer waveguide components with a very good optical performance. Due to the fact that the production method allows for cost-effective fabrication of high numbers and a integration of many channels, this star coupler and similar components are ideal candidates for highly parallel datacom applications, such as in high-end computer backplanes

Keywords

LIGA; integrated optics; optical communication equipment; optical couplers; optical fabrication; optical waveguide components; LIGA technique; cost-effective fabrication; good optical performance; high-end computer backplanes; highly parallel datacom applications; integrated optical waveguide components fabrication; polymer waveguide components; precision engineering methods; reproducible fabrication technique; stable; star coupler; Application software; Concurrent computing; Integrated optics; Optical device fabrication; Optical devices; Optical polymers; Optical waveguide components; Optical waveguides; Precision engineering; Production;

fLanguage

English

Publisher

ieee

Conference_Titel

LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting

Conference_Location

San Francisco, CA

ISSN

1092-8081

Print_ISBN

0-7803-5634-9

Type

conf

DOI

10.1109/LEOS.1999.811893

Filename

811893