Title :
Integrated vertical-cavity laser diodes and resonant photodetectors with hybrid Si3N4/SiO2 top Bragg mirrors
Author :
Maier, T. ; Strasser, G. ; Gornik, E. ; Moser, M. ; Hoevel, R.
Author_Institution :
Inst. fur Festkorperelektronik Mikrostrukturzentrum, Tech. Univ. Wien, Austria
Abstract :
An attractive feature of vertical-cavity surface emitting lasers (VCSEL) is that they readily lend themselves to integration with other optoelectronic components, thus including a greater functionality on the chip and opening new fields of applications. We present a technology to integrate VCSEL and resonance-enhanced photodetectors (REPD) in the top-emitting geometry, utilizing Si3N4/SiO2 top Bragg mirrors. This technique allows one to tune the detector´s optical bandwidth in a wide range without affecting the laser performance. The results are compared to numerical simulations
Keywords :
integrated optoelectronics; laser mirrors; photodetectors; quantum well lasers; silicon compounds; surface emitting lasers; Si3N4-SiO2; VCSEL; hybrid Si3N4/SiO2 top Bragg mirrors; integrated vertical-cavity laser diodes; integration; laser performance; numerical simulations; optical bandwidth; optoelectronic components; resonance-enhanced photodetectors; resonant photodetectors; top-emitting geometry; vertical-cavity surface emitting lasers; Bandwidth; Diode lasers; Geometrical optics; Laser tuning; Mirrors; Optical detectors; Photodetectors; Resonance; Surface emitting lasers; Vertical cavity surface emitting lasers;
Conference_Titel :
LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting
Conference_Location :
San Francisco, CA
Print_ISBN :
0-7803-5634-9
DOI :
10.1109/LEOS.1999.811908
