DocumentCode
3406309
Title
Design and Analysis of the Micro Force Sensor in the Apparatus for Micro Friction Testing
Author
Yu, Huadong ; Li, Yiquan ; Xu, Jinkai ; Zhao, Ping
Author_Institution
Changchun Univ. of Sci. & Technol., Jilin
fYear
2007
fDate
5-8 Aug. 2007
Firstpage
1867
Lastpage
1871
Abstract
In this paper, a novel micro force sensor in the micro friction testing apparatus is designed and analyzed. The sensor is fabricated using the parallel plate-spring. It consists of two groups of springs, one is horizontally parallel and the other is vertically. Thus, it can be used to measure the normal and friction force simultaneously. The sensor has low cost, high precision and reliability.
Keywords
force sensors; friction; microsensors; plates (structures); reliability; springs (mechanical); friction force; micro force sensor; micro friction testing apparatus; microtribology; parallel plate-spring; reliability; Atomic force microscopy; Atomic measurements; Automatic testing; Force measurement; Force sensors; Friction; Instruments; Mechatronics; Micromechanical devices; Springs; Micro friction; Microtribology; Sensor;
fLanguage
English
Publisher
ieee
Conference_Titel
Mechatronics and Automation, 2007. ICMA 2007. International Conference on
Conference_Location
Harbin
Print_ISBN
978-1-4244-0828-3
Electronic_ISBN
978-1-4244-0828-3
Type
conf
DOI
10.1109/ICMA.2007.4303835
Filename
4303835
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