Title :
A relaxation/multipole-accelerated scheme for self-consistent electromechanical analysis of complex 3-D microelectromechanical structures
Author :
Cai, X. ; Yie, H. ; Osterberg, P. ; Gilbert, J. ; Senturia, S. ; White, J.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., MIT, Cambridge, MA, USA
Abstract :
In this paper, two approaches to self-consistent electromechanical analysis of three-dimensional micro-electro-mechanical structures are described. Both approaches combine finite-element mechanical analysis with multipole-accelerated electrostatic analysis, the first using a relaxation algorithm and the second using a surface/Newton generalized conjugate-residual scheme. Examples are given to demonstrate the relative merits of the two approaches.
Keywords :
finite element analysis; complex 3-D microelectromechanical structures; finite-element mechanical analysis; multipole-accelerated electrostatic analysis; relaxation/multipole-accelerated scheme; self-consistent electromechanical analysis; surface/Newton generalized conjugate-residual scheme; Algorithm design and analysis; Contracts; Electrostatic analysis; Equations; Finite element methods; Force control; Microactuators; Performance analysis; Shape; Stress;
Conference_Titel :
Computer-Aided Design, 1993. ICCAD-93. Digest of Technical Papers., 1993 IEEE/ACM International Conference on
Conference_Location :
Santa Clara, CA, USA
Print_ISBN :
0-8186-4490-7
DOI :
10.1109/ICCAD.1993.580070
