Optical characterization of thin dielectric waveguides

Author

Huang, Xu Guang ; Carosi, Gianpaolo ; Persans, Peter ; Zhang, Xi-Cheng

Author_Institution

Dept. of Phys., Appl. Phys. & Astron., Rensselaer Polytech. Inst., Troy, NY, USA

Volume

2

fYear

1999

fDate

1999

Firstpage

756

Abstract

We propose a modified prism-coupling method to measure the refractive index and thickness of single-mode thin waveguides. It is based on the effective index measurement in two orthogonal polarization directions. The measurement error, data fitting procedure, and technique limitations are discussed. This method can be applied to the evaluation of thin dielectric waveguides fabricated with isotropic, homogeneous organic and inorganic materials

Keywords

dielectric thin films; light polarisation; optical films; optical prisms; refractive index measurement; thickness measurement; data fitting procedure; effective index measurement; homogeneous organic materials; inorganic materials; isotropic materials; measurement error; modified prism-coupling method; optical characterization; refractive index measurement; single-mode thin waveguides; thickness measurement; thin dielectric waveguides; two orthogonal polarization directions; Dielectric measurements; Equations; Extraterrestrial measurements; Optical films; Optical refraction; Optical variables control; Optical waveguides; Planar waveguides; Refractive index; Tellurium;

fLanguage

English

Publisher

ieee

Conference_Titel

LEOS '99. IEEE Lasers and Electro-Optics Society 1999 12th Annual Meeting

Conference_Location

San Francisco, CA

ISSN

1092-8081

Print_ISBN

0-7803-5634-9

Type

conf

DOI

10.1109/LEOS.1999.811954

Filename

811954