• DocumentCode
    3406874
  • Title

    A PLL based readout and built-in self-test for MEMS sensors

  • Author

    Supon, Tareq Muhammad ; Thangarajah, K. ; Rashidzadeh, R. ; Ahmadi, Mahdi

  • Author_Institution
    Dept. of Electr. & Comput. Eng., Univ. of Windsor, Windsor, ON, Canada
  • fYear
    2011
  • fDate
    7-10 Aug. 2011
  • Firstpage
    1
  • Lastpage
    4
  • Abstract
    A new readout and self-test circuit for MEMS devices is presented in this paper. A Phase Locked Loop (PLL) has been utilized to convert variations of MEM capacitance to time domain signals. The proposed scheme presents a robust performance against process, power supply and temperature variations due to inherent feedback of PLL systems. Simulation results in Cadence environment using TSMC CMOS 65nm technology indicate that a measurement resolution of 73aF can be achieved.
  • Keywords
    built-in self test; microsensors; phase locked loops; Cadence environment; MEM capacitance; MEMS sensors; PLL based readout; TSMC CMOS technology; built-in self-test; phase locked loop; size 65 nm; time domain signals; CMOS integrated circuits; CMOS technology; Capacitive sensors; Measurement uncertainty; Micromechanical devices; Performance evaluation;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Circuits and Systems (MWSCAS), 2011 IEEE 54th International Midwest Symposium on
  • Conference_Location
    Seoul
  • ISSN
    1548-3746
  • Print_ISBN
    978-1-61284-856-3
  • Electronic_ISBN
    1548-3746
  • Type

    conf

  • DOI
    10.1109/MWSCAS.2011.6026548
  • Filename
    6026548
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3406874