Title :
A PLL based readout and built-in self-test for MEMS sensors
Author :
Supon, Tareq Muhammad ; Thangarajah, K. ; Rashidzadeh, R. ; Ahmadi, Mahdi
Author_Institution :
Dept. of Electr. & Comput. Eng., Univ. of Windsor, Windsor, ON, Canada
Abstract :
A new readout and self-test circuit for MEMS devices is presented in this paper. A Phase Locked Loop (PLL) has been utilized to convert variations of MEM capacitance to time domain signals. The proposed scheme presents a robust performance against process, power supply and temperature variations due to inherent feedback of PLL systems. Simulation results in Cadence environment using TSMC CMOS 65nm technology indicate that a measurement resolution of 73aF can be achieved.
Keywords :
built-in self test; microsensors; phase locked loops; Cadence environment; MEM capacitance; MEMS sensors; PLL based readout; TSMC CMOS technology; built-in self-test; phase locked loop; size 65 nm; time domain signals; CMOS integrated circuits; CMOS technology; Capacitive sensors; Measurement uncertainty; Micromechanical devices; Performance evaluation;
Conference_Titel :
Circuits and Systems (MWSCAS), 2011 IEEE 54th International Midwest Symposium on
Conference_Location :
Seoul
Print_ISBN :
978-1-61284-856-3
Electronic_ISBN :
1548-3746
DOI :
10.1109/MWSCAS.2011.6026548
