Title :
A compact DC - 20 GHz SPDT switch circuit using lateral RF MEMS switches
Author :
Tang, Min ; Liu, Ai Qun ; Agarwal, Ajay
Author_Institution :
Inst. of Microelectron., Singapore, Singapore
Abstract :
A new single-pole-double-throw (SPDT) switch circuit using high-aspect-ratio lateral RF microelectromechanics system (MEMS) switches has been designed to operate from DC to 20 GHz. By using lateral switches and coplanar waveguide configuration, compactness and low-loss can be obtained. The circuit provides greater than 22 dB isolation and less than 0.9 dB insertion losses up to 20 GHz. A low-cost high-yield silicon-on-glass (SOG) fabrication process has been developed to fabricate this SPDT switch circuit. The size of the whole circuit is only 1.64 mm × 1.3 mm in area.
Keywords :
coplanar waveguide components; microswitches; silicon; switching circuits; 20 GHz; Si; compact SPDT switch circuit; coplanar waveguide configuration; high yield SOG fabrication; lateral RF microelectromechanics system switches; low-cost silicon-on-glass fabrication process; single-pole-double-throw switch circuit; Communication switching; Fabrication; Glass; Insertion loss; Microswitches; Power semiconductor switches; Radiofrequency microelectromechanical systems; Silicon; Structural beams; Switching circuits;
Conference_Titel :
Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings
Print_ISBN :
0-7803-9433-X
DOI :
10.1109/APMC.2005.1606530
