Filtered vacuum-arc plasma source for composite coatings deposition

Author

Aksenov, I.I. ; Aksyonov, D.S. ; Vasilyev, V.V. ; Luchaninov, A.A. ; Reshetnyak, E.N. ; Strel´nitskij, V.E.

Author_Institution

Nat. Sci. Centre, Kharkov Inst. of Phys. & Technol., Kharkov

Volume

2

fYear

2008

fDate

15-19 Sept. 2008

Firstpage

567

Lastpage

570

Abstract

Design and principle of operation of the new two-cathode filtered vacuum arc plasma source are described. Results of probe measurements of ion components of the output plasma stream depending on magnitude and distribution geometry of magnetic fields in plasma guiding channels of the source are presented. The system effectiveness ratio of the device makes up ~2.5%. The possibility of control of the ion current density distribution diagram is shown. Nonuniformity of component concentration distribution of the coating at use of the cathodes from aluminum and titanium is about plusmn6.5%.

Keywords

aluminium; composite materials; plasma deposited coatings; plasma deposition; plasma flow; plasma probes; plasma sources; plasma transport processes; titanium; vacuum arcs; Al-Ti; aluminum-titanium coating; composite coating deposition; effectiveness ratio; ion current density distribution diagram; plasma guiding channel; plasma stream; probe measurement; two-cathode filtered vacuum-arc plasma source; Coatings; Geometry; Magnetic field measurement; Magnetic separation; Plasma density; Plasma devices; Plasma measurements; Plasma sources; Probes; Vacuum arcs;

fLanguage

English

Publisher

ieee

Conference_Titel

Discharges and Electrical Insulation in Vacuum, 2008. ISDEIV 2008. 23rd International Symposium on

Conference_Location

Bucharest

ISSN

1093-2941

Print_ISBN

978-973-755-382-9

Electronic_ISBN

1093-2941

Type

conf

DOI

10.1109/DEIV.2008.4676857

Filename

4676857