Application of SEMI S8-95 (ergonomics) for 200 mm and 300 mm Applied Materials ion implanters

As the move progresses toward more efficient use of floor space within the semiconductor fabrication plants, capital equipment layout will become denser in terms of component spacing, decreasing the room once available for maintenance activities. Along with this reduction in floor space the up-scaling of components due to wafer size and equipment will further impact the overall foot print of equipment. Furthermore, this trend will drive the reduction of personnel and equipment within the cleanrooms to a minimum. Given all these factors, ergonomic designs and controls are becoming more and more important to both the supplier and end users of high technology equipment. Applied Materials is actively working on many solutions, addressed within the SEMI S8-95 standard with an emphasis on the SESC guidelines. Applied Materials has reviewed the xRS series, including the new 300 mm implanters, reviewing areas such as (1) manual handling equipment for both 200 mm and 300 mm products; (2) in-situ handling and maintenance aids; (3) general human factor issues; (4) the design of cleanroom compatible tools to properly and safely perform the required maintenance functions within a 1 meter, service access between tools