Eigenfrequency Shift of Micro-sensor with the Concentrated Mass and Spring

A new method called finite mode transform method (FMTM) on the eigenfrequency computation of an Euler-Bernoulli beam carrying arbitrary number of concentrated mass and spring is introduced and compared with other existing methods. The FMTM shows good convergence with the increase of the mode number and is a much faster algorithm compared with the analytical method and Galerkin method when the total number of concentrated mass and spring is small. A discussion on the advantages and disadvantages of the microsensor eigenfrequency computation formulation by these three methods (FMTM, analytical and Galerkin) is also presented.