• DocumentCode
    3409465
  • Title

    Gas release from a compact powdery sample ion source

  • Author

    Wada, Motoi ; Kasuya, Toshiro ; Sasao, Mamiko ; Kawano, Hiroyuki

  • Author_Institution
    Dept. of Electron., Doshisha Univ., Kyoto, Japan
  • Volume
    1
  • fYear
    1999
  • fDate
    1999
  • Firstpage
    334
  • Abstract
    The species and the quantities of gases released during the operation of a compact powdery sample ion source were investigated. During the initial heating of the filament, H2O was emitted from the powder and its partial pressure occupied more than 90% of the total pressure. Neither LiH nor LiN3, emitted detectable amount of Li. Atomic and molecular nitrogens were found emitted during the operation with LiN3, and the rate of N2 emission due to electron stimulated decomposition was compared with the extracted ion beam. Gas efficiencies for positive and negative ions were estimated to be the order of 10-4 and 10-3, respectively. The gas release rate from the ion source can be reduced below 2×10-6 Pa-m3/s for 1 mA of electron current by heating the powder prior to the source operation
  • Keywords
    electron stimulated desorption; ion sources; negative ions; positive ions; H2O; LiH; LiN3; N2; N2 emission rate; atomic nitrogens; compact powdery sample ion source; electron current; electron stimulated decomposition; extracted ion beam; gas efficiencies; gas release; ion implantation; molecular nitrogens; negative ions; partial pressure; positive ions; source operation; total pressure; Containers; Electrodes; Electron emission; Electron guns; Flanges; Heating; Ion beams; Ion sources; Lenses; Powders;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Ion Implantation Technology Proceedings, 1998 International Conference on
  • Conference_Location
    Kyoto
  • Print_ISBN
    0-7803-4538-X
  • Type

    conf

  • DOI
    10.1109/IIT.1999.812121
  • Filename
    812121