Fault Simulation for Typical Structures in the MEMS Gyro

The fault in MEMS gyro always cause huge damage because it is often used in critical system. Failure mode and effect analysis can predict failure modes at an early stage of the MEMS gyro design. MEMS gyro is mainly composed of typical structures such as comb diver, parallel plate capacitor and cantilever. So this analysis is restricted to fault simulation in system level and components level for the typical structures and relies on integrating qualitative failure analysis and quantitative fault simulation.