Title :
ISAF 2002. Proceedings of the 13th IEEE International Symposium on Applications of Ferroelectrics (Cat. No.02CH37341)
Keywords :
ferroelectric devices; ferroelectric materials; ferroelectric thin films; micromechanical devices; MEMS applications; characterization techniques; ferroelectrics; fundamental properties; modeling; thin film materials;
Conference_Titel :
Applications of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on
Conference_Location :
Nara, Japan
Print_ISBN :
0-7803-7414-2
DOI :
10.1109/ISAF.2002.1195855
