Title :
Smart force sensors for scanning force microscope using the micromachined piezoelectric PZT cantilevers
Author :
Chengkuo Lee ; Itoh, T. ; Maeda, R. ; Suga, T.
Abstract :
The fabrication, characteristics, and applications of a smart PZT force sensor and its sensor array for the scanning force microscopes are interpreted in this paper. This force sensor is a cantilever shape, with the dimension like 125-160/spl times/50/spl times/4 /spl mu/m, and is able to simultaneously execute the self-excited force sensing and z-directional actuating. Clear images and parallel images can be obtained by the SFM operated in air and in liquid with a single cantilever, and by the multiprobe SFM using a cantilever array, respectively.
Keywords :
atomic force microscopy; force measurement; intelligent sensors; lead compounds; micromachining; microsensors; piezoceramics; piezoelectric transducers; PZT; PbZrO3TiO3; micromachined piezoelectric PZT cantilever; multiprobe SFM; parallel image; scanning force microscope; self-excited force sensing; sensor array; smart force sensor; z-directional actuating; Fabrication; Force sensors; Intelligent sensors; Mechanical sensors; Microscopy; Optical recording; Sensor arrays; Sensor phenomena and characterization; Shape; Wet etching;
Conference_Titel :
Electron Devices Meeting, 1996. IEDM '96., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3393-4
DOI :
10.1109/IEDM.1996.554042
