Corner point lot qualification technique

Author

Gagnon, James J. ; Potts, David C. ; Park, Steven C. ; Whitcomb, Richard D.

Author_Institution

Data Manage. Div., South Portland, ME, USA

fYear

1995

fDate

22-25 Oct. 1995

Firstpage

29

Lastpage

33

Abstract

This paper describes a new approach in the sample make up for qualifying a new process, a process change, and, or a material change. This new approach, which we will refer to as the corner point lot method, produces a qualification sample that better represents the process operating window. The corner point lot method uses a design of experiment approach to purposely force critical parameters, as identified through Failure Mode and Effect Analysis (FMEA), to the corners of their spec limits.

Keywords

design of experiments; failure analysis; integrated circuit manufacture; process control; statistical process control; corner point lot method; critical parameters; design of experiment approach; failure mode and effect analysis; material change; process change; process operating window; qualification sample; qualification technique; sample make up; Cause effect analysis; Design methodology; Failure analysis; Frequency; Performance analysis; Process control; Process design; Qualifications; Stress; US Department of Energy;

fLanguage

English

Publisher

ieee

Conference_Titel

Integrated Reliability Workshop, 1995. Final Report., International

Conference_Location

Lake Tahoe, CA, USA

Print_ISBN

0-7803-2705-5

Type

conf

DOI

10.1109/IRWS.1995.493571

Filename

493571