CMOS technology scaling, 0.1 /spl mu/m and beyond

A projection of CMOS technology scaling and the expected performance, density, and power improvements are presented. Technology for scaling to sub-0.1 /spl mu/m effective channel length (L/sub eff/) is discussed, and the key barriers are examined. It is shown that device speed enhancement of about 3X, circuit density improvement of 8X, and 20-40X improvement in power-delay product (mW/MIPS) will be achieved by scaling the CMOS technologies down to the sub-0.1 /spl mu/m regime, operating in the 1 V range, as compared with today´s high performance 0.35 /spl mu/m devices at 3.3 V. Such anticipated significant improvements in the silicon chip performance will continue to fuel the growth of the semiconductor industry for the next decade.