• DocumentCode
    3412697
  • Title

    The SAW Characterization Of PECVD Films On GaAs

  • Author

    Hickernell, F.S.

  • Author_Institution
    Motorola GSTG
  • fYear
    1994
  • fDate
    17-23 May 1994
  • Keywords
    Acoustic devices; Acoustic materials; Acoustic waves; Dielectric films; Dielectric materials; Gallium arsenide; Piezoelectric films; Propagation losses; Semiconductor films; Surface acoustic waves;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
  • Conference_Location
    Moscow, Russia
  • Type

    conf

  • DOI
    10.1109/ISSWAS.1994.662442
  • Filename
    662442
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3412697