Title :
The SAW Characterization Of PECVD Films On GaAs
Author :
Hickernell, F.S.
Author_Institution :
Motorola GSTG
Keywords :
Acoustic devices; Acoustic materials; Acoustic waves; Dielectric films; Dielectric materials; Gallium arsenide; Piezoelectric films; Propagation losses; Semiconductor films; Surface acoustic waves;
Conference_Titel :
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location :
Moscow, Russia
DOI :
10.1109/ISSWAS.1994.662442
