Title :
Research on Micro-Electro-Mechanical-Systems Digital Geophone
Author :
Zhang, Xiaodan ; Ke, Xizheng ; Zhang, Zhiyu
Author_Institution :
Inst. of Autom. & Inf. Eng., Xi´´an Univ. of Technol., Xi´´an, China
Abstract :
Geophone is a special purpose sensor which can translate the mechanical vibration into the electrical signal. Micro-Electro-Mechanical Systems (MEMS) digital geophone is the one of the most advanced geophones at present. This paper researches on the internal structure of MEMS digital geophone and its working principle, and then a close circuit system of MEMS digital geophone is build according to the performance analysis experiments. The simulation results show the effectiveness and feasibility of the build MEMS digital geophone´s close circuit system.
Keywords :
digital circuits; micromechanical devices; seismometers; MEMS digital geophone internal structure; MEMS digital geophone working principle; close circuit system; microelectromechanical systems digital geophone; performance analysis; Accelerometers; Automation; Damping; Mathematical model; Micromechanical devices; Robot sensing systems; Sensitivity; Micro-Electro-Mechanical Systems (MEMS); close circuit; digital geophone; electrical signal; mechanical vibration;
Conference_Titel :
Artificial Intelligence and Computational Intelligence (AICI), 2010 International Conference on
Conference_Location :
Sanya
Print_ISBN :
978-1-4244-8432-4
DOI :
10.1109/AICI.2010.324
