Title :
The design and fabrication of microfluidic flow sensors
Author :
Rasmussen, Angela ; Zaghloul, Mona E.
Author_Institution :
Dept. of Electr. Eng. & Comput. Sci., George Washington Univ., Washington, DC, USA
Abstract :
This paper presents a unique integration of CMOS flow sensors with two different novel microchannel structures. The design and fabrication of the flow sensors with their integrated microchannels are described. The design of the flow sensors consists of utilizing the layers available in the 2.0 μm standard CMOS process. A three resistor anemometer along with a thermocouple is investigated as the structures for the flow sensors. Fabrication of the designs is done through the MOSIS CMOS 2.0 μm process. The MEMS flow sensors and microchannels are then completed by using post-processing steps
Keywords :
CMOS integrated circuits; anemometers; microfluidics; microsensors; thermocouples; 2.0 micron; CMOS flow sensors; MEMS flow sensors; MOSIS CMOS process; integrated microchannels; microchannel structures; microfluidic flow sensors; post-processing steps; thermocouple; three resistor anemometer; Biosensors; CMOS process; Fabrication; Fluid flow measurement; Microchannel; Microfluidics; Silicon; Temperature dependence; Temperature sensors; Thermal sensors;
Conference_Titel :
Circuits and Systems, 1999. ISCAS '99. Proceedings of the 1999 IEEE International Symposium on
Conference_Location :
Orlando, FL
Print_ISBN :
0-7803-5471-0
DOI :
10.1109/ISCAS.1999.777529
