The design and fabrication of microfluidic flow sensors

Author

Rasmussen, Angela ; Zaghloul, Mona E.

Author_Institution

Dept. of Electr. Eng. & Comput. Sci., George Washington Univ., Washington, DC, USA

Volume

5

fYear

1999

fDate

1999

Firstpage

136

Abstract

This paper presents a unique integration of CMOS flow sensors with two different novel microchannel structures. The design and fabrication of the flow sensors with their integrated microchannels are described. The design of the flow sensors consists of utilizing the layers available in the 2.0 μm standard CMOS process. A three resistor anemometer along with a thermocouple is investigated as the structures for the flow sensors. Fabrication of the designs is done through the MOSIS CMOS 2.0 μm process. The MEMS flow sensors and microchannels are then completed by using post-processing steps

Keywords

CMOS integrated circuits; anemometers; microfluidics; microsensors; thermocouples; 2.0 micron; CMOS flow sensors; MEMS flow sensors; MOSIS CMOS process; integrated microchannels; microchannel structures; microfluidic flow sensors; post-processing steps; thermocouple; three resistor anemometer; Biosensors; CMOS process; Fabrication; Fluid flow measurement; Microchannel; Microfluidics; Silicon; Temperature dependence; Temperature sensors; Thermal sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Circuits and Systems, 1999. ISCAS '99. Proceedings of the 1999 IEEE International Symposium on

Conference_Location

Orlando, FL

Print_ISBN

0-7803-5471-0

Type

conf

DOI

10.1109/ISCAS.1999.777529

Filename

777529