Title :
PZT coated membrane structures for micromachined ultrasonic transducers
Author :
Baborowski, J. ; Muralt, P. ; Ledermann, N. ; Petitgrand, S. ; Bosseboeuf, A. ; Setter, N. ; Gaucher, Ph
Author_Institution :
Ceramics Lab., Swiss Fed. Inst. of Technol., Lausanne, Switzerland
fDate :
28 May-1 June 2002
Abstract :
Micromachined ultrasonic transducers (MUT) are investigated for phased arrays in high frequency acoustic imaging to overcome resolution and frequency limits of reticulated bulk PZT transducers applied today. In this paper, thin SiO2/Si membranes coated with (100)-textured Pb(ZrxTi1-x)O3 (PZT) thin films deposited by sol-gel techniques are studied for pMUT applications. The first part of this work is devoted to fabrication processes. Major issues are the quality of the PZT films, the overall low stress of the membranes and the precision of the patterning processes. A second part deals with the characterization of cantilever and membrane structures. The findings are used to optimize a transducer design for medical imaging in the range of 5MHz.
Keywords :
biomedical transducers; electric admittance; etching; membranes; microactuators; micromachining; micromechanical resonators; piezoelectric thin films; piezoelectric transducers; ultrasonic transducers; PZT; PZT coated membrane structures; PbZrO3TiO3; Si; admittance curves; cantilever structures; coupling factors; double side polished silicon wafer; fabrication processes; high frequency acoustic imaging; micromachined ultrasonic transducers; patterning processes; phased arrays; piezoelectric MEMS; precision; sol-gel techniques; thin membranes; transducer design; wet etching; Acoustic arrays; Acoustic imaging; Acoustic transducers; Biomembranes; Frequency; Image resolution; Phased arrays; Semiconductor thin films; Ultrasonic transducer arrays; Ultrasonic transducers;
Conference_Titel :
Applications of Ferroelectrics, 2002. ISAF 2002. Proceedings of the 13th IEEE International Symposium on
Print_ISBN :
0-7803-7414-2
DOI :
10.1109/ISAF.2002.1195973
