مرکز منطقه ای اطلاع رساني علوم و فناوري

DocumentCode :

3413688

Title :

Session 17 Overview: MEMS and Sensors

Author :

Ayazi, Farrokh ; Akinwande, Akintunde Ibitayo

Author_Institution :

Georgia Institute of Technology

fYear :

2004

fDate :

15-19 Feb. 2004

Firstpage :

308

Lastpage :

309

Abstract :

Start of the above-titled section of the conference proceedings record.

fLanguage :

English

Publisher :

ieee

Conference_Titel :

Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International

Conference_Location :

San Francisco, CA

ISSN :

0193-6530

Print_ISBN :

0-7803-8267-6

Type :

conf

DOI :

10.1109/ISSCC.2004.1332717

Filename :

1332717

Link To Document :