A single-chip CMOS micro-hotplate array for hazardous-gas detection and material characterization

Author

Barrettino, Diego ; Graf, M. ; Hafizovic, S. ; Taschini, S. ; Hagleitner, Christoph ; Hierlemann, Andreas ; Baltes, H.

Author_Institution

Swiss Fed. Inst. of Technol., Zurich, Switzerland

fYear

2004

fDate

15-19 Feb. 2004

Firstpage

312

Abstract

A single-chip microsystem for the detection and discrimination of hazardous gases and solid-state material characterization is presented. The circuit features three micro-hotplates, and each requires mixed-signal circuitry. The microsystem is fabricated in industrial 0.8μm CMOS technology with post-CMOS micromachining. The power efficiency of the micro-hotplate is 10°C/mW and represents a 60% improvement.

Keywords

CMOS integrated circuits; digital control; gas sensors; micromachining; microsensors; mixed analogue-digital integrated circuits; temperature control; gas sensor array; hazardous-gas detection; mixed-signal circuitry; on-chip digital temperature controller; post-CMOS micromachining; power efficiency; power-down mode; single-chip CMOS micro-hotplate array; single-chip microsystem; solid-state material characterization; temperature control loops; tracking mode performance; Electrodes; Gas detectors; Hazardous materials; Monolithic integrated circuits; Resistors; Sensor arrays; Temperature control; Temperature measurement; Temperature sensors; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International

ISSN

0193-6530

Print_ISBN

0-7803-8267-6

Type

conf

DOI

10.1109/ISSCC.2004.1332719

Filename

1332719