Title :
60-MHz wine-glass micromechanical-disk reference oscillator
Author :
Yu-Wei Lin ; Seungbae Lee ; Sheng-Shian Li ; Yuan Xie ; Zeying Ren ; Nguyen, Clark T.-C
Author_Institution :
Michigan Univ., Ann Arbor, MI, USA
Abstract :
A reference oscillator utilizing a 60MHz, MEMS-based, wine glass disk vibrating micromechanical resonator with a Q of 48,000 and sufficient power handling capability to achieve a far-from-carrier phase noise of -130dBc/Hz is demonstrated. When divided down to 10MHz, this corresponds to an effective level of -145dBc/Hz.
Keywords :
VHF oscillators; frequency stability; micromechanical resonators; reference circuits; 60 MHz; far-from-carrier phase noise; frequency stability; high impedance resonator; micromechanical-disk reference oscillator; modified Bessel function quotient; power handling capability; three-polysilicon self-aligned stem process; transresistance CMOS sustaining amplifier; wine glass disk vibrating resonator; wine glass mode shape; Glass; Impedance; Micromechanical devices; Oscillators; Phase noise; Resonant frequency; Stability; Transceivers; Voltage; Wireless communication;
Conference_Titel :
Solid-State Circuits Conference, 2004. Digest of Technical Papers. ISSCC. 2004 IEEE International
Print_ISBN :
0-7803-8267-6
DOI :
10.1109/ISSCC.2004.1332724
