• DocumentCode
    3415736
  • Title

    Progress in power ICs and MEMS, "analog" technologies to interface the real world

  • Author

    Contiero, Claudio ; Murari, Bruno ; Vigna, Benedetto

  • Author_Institution
    TPA Groups R&D Dept., STMicroelectronics, Milan, Italy
  • fYear
    2004
  • fDate
    24-27 May 2004
  • Firstpage
    3
  • Lastpage
    12
  • Abstract
    The dramatic progress in integrated circuit technology has led to a huge increase of achievable digital computing power not accompanied by a parallel evolution in the capability to interface to the real world which is "analog" and not digital. This capability is fundamental in many products and represents the driving force in their evolution. Technologies like bipolar-CMOS-DMOS (BCD), available for many years to realize power ICs, appear to be more suitable than the pure CMOS to play the role of building analog interfaces. An emerging frontier of analog interfaces is represented by micro electro mechanical systems (MEMS) where the manufacturing technology developed in many years of microelectronics is being applied to micro-machined silicon, creating new solutions that combine electrical, mechanical, fluidic and optical elements. In this paper, an overview of BCD technology trends and of new applications of MEMS devices is examined.
  • Keywords
    BiCMOS integrated circuits; micromechanical devices; power integrated circuits; BCD technology; MEMS; Si; bipolar-CMOS-DMOS technology; micro electro mechanical systems; micro-machined silicon; power IC; real world analog/digital interfacing; BiCMOS integrated circuits; Microelectromechanical devices; Power integrated circuits;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Power Semiconductor Devices and ICs, 2004. Proceedings. ISPSD '04. The 16th International Symposium on
  • Print_ISBN
    4-88686-060-5
  • Type

    conf

  • DOI
    10.1109/ISPSD.2004.1332843
  • Filename
    1332843