• DocumentCode
    3417403
  • Title

    4H-SiC pin diodes on the (000-1) C-face with reduced forward degradation

  • Author

    Nakayama, K. ; Sugawara, Y. ; Tsuchida, H. ; Miyanagi, T. ; Kamata, I. ; Nakamura, T. ; Asano, K. ; Takayama, D.

  • Author_Institution
    Kansai Electr. Power Co., Inc, Hyogo, Japan
  • fYear
    2004
  • fDate
    24-27 May 2004
  • Firstpage
    357
  • Lastpage
    360
  • Abstract
    The dependence of a pin diode´s forward voltage degradation on device structures and crystal faces has been investigated. This investigation clarified for the first time that forward voltage degradation is reduced by fabricating the diodes on the (000-1) C-face off-angled toward <11-20>. High voltage 4H-SiC pin diodes on the (000-1) C-face with reduced forward degradation have also been fabricated successfully. A pin diode´s highest breakdown voltage of 4.6 kV is achieved, and ΔVf reduces to 0.04 V.
  • Keywords
    crystal faces; p-i-n diodes; power semiconductor diodes; semiconductor device breakdown; silicon compounds; wide band gap semiconductors; 0.04 V; 4.6 kV; 4H-SiC (000-1) C-face pin diodes; SiC; breakdown voltage; crystal face effects; diode forward voltage degradation; high voltage pin diodes; Power semiconductor diodes; Silicon compounds; p-i-n diodes;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Power Semiconductor Devices and ICs, 2004. Proceedings. ISPSD '04. The 16th International Symposium on
  • Print_ISBN
    4-88686-060-5
  • Type

    conf

  • DOI
    10.1109/ISPSD.2004.1332944
  • Filename
    1332944