The microwave equivalent circuits of tuned MEMS shunt-capacitive switches

Author

Yue-fei, Li ; Xue-xia, Yang ; Wen-jun, Zhang

Author_Institution

Sch. of Commun. & Inf. Eng., Shanghai Univ., China

Volume

5

fYear

2005

fDate

4-7 Dec. 2005

Abstract

This paper proposes the microwave equivalent circuit models of the tuned MEMS shunt-capacitive switches and presents their down-state resonance choice formulation and upstate impedance matching formulation. The design method of this kind of MEMS switches is developed based on the analysis of microwave equivalent circuits. The circuit simulation results of the MEMS switch for X band based on those equivalent models are described and compared with the results of HFSS software. The good agreement verifies the effectiveness of those formulations. Those simplified models help to design high-performance RF MEMS switches in an easier way.

Keywords

equivalent circuits; impedance matching; microswitches; microwave switches; HFSS software; RF MEMS; down-state resonance choice formulation; microwave equivalent circuits; tuned MEMS shunt-capacitive switches; upstate impedance matching formulation; Circuit simulation; Design methodology; Equivalent circuits; Impedance matching; Micromechanical devices; Microswitches; Microwave theory and techniques; Resonance; Switches; Switching circuits; CPW; MEMS; equivalent circuits; shunt-capacitive switch;

fLanguage

English

Publisher

ieee

Conference_Titel

Microwave Conference Proceedings, 2005. APMC 2005. Asia-Pacific Conference Proceedings

Print_ISBN

0-7803-9433-X

Type

conf

DOI

10.1109/APMC.2005.1607105

Filename

1607105