Development and commercialisation of silicon MEMS gyroscopes

The principles of coriolis gyros are discussed to illustrate the material selection process and fabrication technologies required for the successful manufacture of a silicon ring gyro. This is illustrated by both technical and commercial considerations of fabrication and packaging. Several commercial and defence applications are cited. Although the considerations are illustrated by the high volume production of silicon gyroscopes the lessons learnt are applicable to many other MEMS devices.