An analytical approach to improving equipment productivity

An analytical approach that shows how data paths from actual stepper fabs are made possible by the use of several computer programs, including computerized networks for collection and analysis of field reliability data, is described. Using the SEMI E-10-90 standard, comprehensive reliability studies are conducted. The database is used by service support personnel to improve scheduled maintenance, training and stepper optimization; R&D and manufacturing use the data with RAMP (Reliability Analysis and Modeling Program) for reliability predictions associated with engineering changes, improved SPC controls, and new R&D projects. Tradeoffs can then be evaluated for various reliability improvement alternatives, including higher inherent reliability and redundancy. These changes are checked against the cost of ownership (COO) model to forecast their impact on both supplier and customer economics. Customer requirements are checked against the COO to obtain a cost/benefit analysis of features and performance before final design selection. The analytical approach described provides an environment for rational product definition and design during the product development process, resulting in better time-to-market effectiveness