• DocumentCode
    3418517
  • Title

    Wafer fab production controls for the 90s

  • Author

    Clark, Charles D. ; Bunch, Thomas E. ; Dobbins, Martin C.

  • Author_Institution
    Adv. Micro Devices, Inc., Austin, TX, USA
  • fYear
    1992
  • fDate
    30 Sep-1 Oct 1992
  • Firstpage
    36
  • Lastpage
    38
  • Abstract
    The introduction and implementation of production control systems in wafer fabrication operations are discussed. The introduction of production planning systems and the results from the implementation of control systems placed on work-in-process inventory, equipment status, batch queuing/set-up, and statistical processing are considered
  • Keywords
    batch processing (industrial); computer aided production planning; production control; semiconductor device manufacture; statistical process control; stock control; batch queuing/set-up; equipment status; production control systems; production planning systems; statistical processing; wafer fabrication operations; work-in-process inventory; Continuous improvement; Control systems; Customer service; Fabrication; Job shop scheduling; Meeting planning; Production control; Production planning; Production systems; Pulp manufacturing;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Advanced Semiconductor Manufacturing Conference and Workshop, 1992. ASMC 92 Proceedings. IEEE/SEMI 1992
  • Conference_Location
    Cambridge, MA
  • Print_ISBN
    0-7803-0740-2
  • Type

    conf

  • DOI
    10.1109/ASMC.1992.253831
  • Filename
    253831