• DocumentCode
    3418645
  • Title

    HfC(310) high brightness sources for advanced imaging applications

  • Author

    Mackie, W.A. ; Lovell, J.M. ; Curtis, T.W. ; Magera, G.G.

  • Author_Institution
    Appl. Phys. Technol., Inc., McMinnville, OR, USA
  • fYear
    2013
  • fDate
    8-12 July 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    We report using a Philips XL40 SEM to demonstrate the performance of HfC(310) emitters operating in extended Schottky mode. Higher brightness and smaller spot sizes were obtained over commercial Schottky emitters operating under identical conditions.
  • Keywords
    Schottky effect; brightness; electron field emission; hafnium compounds; scanning electron microscopy; HfC; Philips XL40 SEM; Schottky mode; advanced imaging applications; brightness; commercial Schottky emitters; hafnium carbide emitters; Zirconium; Schottky electron source; hafnium carbide;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
  • Conference_Location
    Roanoke, VA
  • Type

    conf

  • DOI
    10.1109/IVNC.2013.6624722
  • Filename
    6624722