DocumentCode
3418645
Title
HfC(310) high brightness sources for advanced imaging applications
Author
Mackie, W.A. ; Lovell, J.M. ; Curtis, T.W. ; Magera, G.G.
Author_Institution
Appl. Phys. Technol., Inc., McMinnville, OR, USA
fYear
2013
fDate
8-12 July 2013
Firstpage
1
Lastpage
2
Abstract
We report using a Philips XL40 SEM to demonstrate the performance of HfC(310) emitters operating in extended Schottky mode. Higher brightness and smaller spot sizes were obtained over commercial Schottky emitters operating under identical conditions.
Keywords
Schottky effect; brightness; electron field emission; hafnium compounds; scanning electron microscopy; HfC; Philips XL40 SEM; Schottky mode; advanced imaging applications; brightness; commercial Schottky emitters; hafnium carbide emitters; Zirconium; Schottky electron source; hafnium carbide;
fLanguage
English
Publisher
ieee
Conference_Titel
Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
Conference_Location
Roanoke, VA
Type
conf
DOI
10.1109/IVNC.2013.6624722
Filename
6624722
Link To Document