DocumentCode
3418811
Title
Some Properties Of Thick ZnO-layers On Oxidized Silicon Wafers
Author
Buff, W. ; Moeller, F. ; Schwesinger, N.
Author_Institution
Technical University of Ilmenau
fYear
1994
fDate
17-23 May 1994
Keywords
Acoustic measurements; Acoustic waves; Electrical resistance measurement; Silicon; Sputtering; Stress measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location
Moscow, Russia
Type
conf
DOI
10.1109/ISSWAS.1994.662473
Filename
662473
Link To Document