Title :
Some Properties Of Thick ZnO-layers On Oxidized Silicon Wafers
Author :
Buff, W. ; Moeller, F. ; Schwesinger, N.
Author_Institution :
Technical University of Ilmenau
Keywords :
Acoustic measurements; Acoustic waves; Electrical resistance measurement; Silicon; Sputtering; Stress measurement;
Conference_Titel :
Surface Waves in Solid and Layered Structures, 1994, and National Conference on Acoustoelectronics. 1994 International Symposium on. Program and Abstracts
Conference_Location :
Moscow, Russia
DOI :
10.1109/ISSWAS.1994.662473
