DocumentCode :
3418981
Title :
High vacuum micropump for miniature nanoelectronics devices
Author :
Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Dziuban, Jan A.
Author_Institution :
Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
fYear :
2013
fDate :
8-12 July 2013
Firstpage :
1
Lastpage :
2
Abstract :
The microengineered 5×5×3.2 mm3 silicon-glass glow-discharge high vacuum micropump has been presented in this article. Preliminary results showed very good pumping properties (p <; 10-6 hPa), more than three orders of magnitude better than NEG getter can provide. Micropump integrated with other nanoelectronics devices helps to stabilize their operation.
Keywords :
glow discharges; micropumps; nanoelectronics; silicon; high vacuum micropump; miniature nanoelectronics devices; pumping property; silicon-glass glow-discharge; Nanoelectronics; MEMS getter; glow discharge; vacuum micropump;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
Conference_Location :
Roanoke, VA
Type :
conf
DOI :
10.1109/IVNC.2013.6624736
Filename :
6624736
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3418981
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