• DocumentCode
    3418981
  • Title

    High vacuum micropump for miniature nanoelectronics devices

  • Author

    Grzebyk, Tomasz ; Gorecka-Drzazga, Anna ; Dziuban, Jan A.

  • Author_Institution
    Fac. of Microsyst. Electron. & Photonics, Wroclaw Univ. of Technol., Wroclaw, Poland
  • fYear
    2013
  • fDate
    8-12 July 2013
  • Firstpage
    1
  • Lastpage
    2
  • Abstract
    The microengineered 5×5×3.2 mm3 silicon-glass glow-discharge high vacuum micropump has been presented in this article. Preliminary results showed very good pumping properties (p <; 10-6 hPa), more than three orders of magnitude better than NEG getter can provide. Micropump integrated with other nanoelectronics devices helps to stabilize their operation.
  • Keywords
    glow discharges; micropumps; nanoelectronics; silicon; high vacuum micropump; miniature nanoelectronics devices; pumping property; silicon-glass glow-discharge; Nanoelectronics; MEMS getter; glow discharge; vacuum micropump;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
  • Conference_Location
    Roanoke, VA
  • Type

    conf

  • DOI
    10.1109/IVNC.2013.6624736
  • Filename
    6624736
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3418981