Title :
Assessment of ferromagnetic integrated inductors for Si-technology
Author :
Rejaei, B. ; Vroubel, M. ; Zhuang, Y. ; Burghartz, J.N.
Author_Institution :
Lab. of Electron. Components, Technol. & Mater., Delft Univ. of Technol., Netherlands
Abstract :
Recent experimental results for integrated magnetic inductors for radio frequency (RF) applications are reviewed. The effects of eddy-current loss in the conductive ferromagnetic film, permeability anisotropy, and inductor geometry on the inductance of magnetic inductors are discussed using several examples.
Keywords :
eddy current losses; elemental semiconductors; ferromagnetic materials; inductors; magnetic anisotropy; magnetic cores; magnetic permeability; magnetic thin film devices; radiofrequency integrated circuits; silicon; Si; Si RFIC technology; conductive ferromagnetic film; eddy current loss; inductance; integrated magnetic inductor; magnetic core; permeability anisotropy; Anisotropic conductive films; Anisotropic magnetoresistance; Geometry; Inductance; Inductors; Magnetic anisotropy; Magnetic films; Permeability; Perpendicular magnetic anisotropy; Radio frequency;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers. 2003 Topical Meeting on
Conference_Location :
Grainau, Germany
Print_ISBN :
0-7803-7787-7
DOI :
10.1109/SMIC.2003.1196679
