Enhanced field emission with self-alingned carbon nanotube emitters grown by RAP process

Author

Jung Soo Kang ; Su Woong Lee ; Seon Yong Park ; Ha Rim Lee ; Jin Jang ; Kyu Chang Park

Author_Institution

Dept. of Inf. Display & Adv. Display Res. Center, Kyung Hee Univ., Seoul, South Korea

fYear

2013

fDate

8-12 July 2013

Firstpage

1

Lastpage

2

Abstract

We optimized the triode structure for field emission with carbon nanotube emitters grown with resist-assisted pattering process. Carbon nanotube emitters were grown on silicon substrate and patterned with grid mesh for structural optimization. The gate mesh was self-aligned with the carbon nanotube for lower leakage current, resulting higher electron emission current and transmission ratio. With the optimized triode structure, we fabricated field emission lamp and obtain luminance of 23,000 cd/m².

Keywords

carbon nanotubes; electron field emission; leakage currents; triodes; RAP process; electron emission current; enhanced field emission; fabricated field emission lamp; gate mesh; grid mesh; leakage current; resist-assisted patterning process; self-aligned carbon nanotube emitters; silicon substrate; structural optimization; transmission ratio; triode structure; Anodes; Carbon dioxide; Cathodes; Logic gates; Plasma measurements; RNA; CNT; Field emission lamp; RAP; Triode;

fLanguage

English

Publisher

ieee

Conference_Titel

Vacuum Nanoelectronics Conference (IVNC), 2013 26th International

Conference_Location

Roanoke, VA

Type

conf

DOI

10.1109/IVNC.2013.6624742

Filename

6624742