DocumentCode :
3419308
Title :
Sharp bare and gold-coated copper nanocones with improved field emission performance
Author :
Serbun, P. ; Jordan, F. ; Muller, Gunter ; Alber, I. ; Toimil-Molares, M.E. ; Trautmann, C.
Author_Institution :
FB C Phys. Dept., Univ. of Wuppertal, Wuppertal, Germany
fYear :
2013
fDate :
8-12 July 2013
Firstpage :
1
Lastpage :
2
Abstract :
We have optimized the fabrication of sharp copper nanocones (Cu-NCs) for flat patch-structured field emission (FE) cathodes. Polycarbonate (PC) foils were irradiated through a shadow mask with swift Xe or U ions. The ion tracks were asymmetrically etched in a mixture of NaOH and methanol. These membranes were metallized, fixed on an Al plate, and electrochemically filled with Cu through the small pore openings. Flat cathodes of 25 mm2 size with mechanically stable Cu-NCs of ~28 μm height, ~3 μm base, and ~130 nm tip diameter were obtained. Fairly distributed FE with at least 8 (10) emitters per patch was achieved for the bare (60-nm Au-coated) Cu-NCs. Integral measurements of selected patches yielded average stable FE currents up to 30 (151) μA at 32 (50) V/μm, respectively.
Keywords :
cathodes; etching; field emission; foils; masks; membranes; nanoelectronics; nanostructured materials; semiconductor device metallisation; Al; Al plate; Cu; FE cathodes; FE currents; PC foils; asymmetrical etching; emitters; field emission performance; flat cathodes; flat patch-structured field emission cathode; gold-coated copper nanocones; integral measurements; ion tracks; membranes; metallization; methanol; polycarbonate foils; shadow mask; sharp copper nanocones fabrication; Cathodes; Iron; Xenon; Au coating; Cu nanocones; current limits; field emission; ion-track etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Vacuum Nanoelectronics Conference (IVNC), 2013 26th International
Conference_Location :
Roanoke, VA
Type :
conf
DOI :
10.1109/IVNC.2013.6624750
Filename :
6624750
Link To Document :
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