Title :
Network-oriented models of transmission line structures in MMICs
Author :
Lukashevich, D. ; Russer, P.
Author_Institution :
Inst. fur Hochfrequenztechnik, Technische Univ. Munchen, Germany
Abstract :
Further reduction of microwave monolithic integrated circuit (MMIC) dimensions will require multilayered wiring and transmission line structures with cross-sectional dimensions of the conductors in the order of micrometers. In order to achieve further reduction in conductor losses, copper is also considered for internal wiring. The exact modelling of the transmission properties of the line structures requires full-wave modelling of the electromagnetic field in the semiconductor and insulator regions as well as within the conductors. In this paper various transmission line structures have been analyzed using the mode matching (MM) approach. Based on the numerical simulation of the transmission lines equivalent network-oriented models (NOMs) are extracted.
Keywords :
MMIC; equivalent circuits; integrated circuit modelling; mode matching; transmission line theory; Cu; MMIC; conductor loss; copper multilayered wiring; damascene technology; electromagnetic field; equivalent network-oriented model; full-wave model; mode matching; numerical simulation; transmission line; Conductors; Copper; Distributed parameter circuits; Electromagnetic fields; Electromagnetic modeling; Insulation; MMICs; Monolithic integrated circuits; Transmission lines; Wiring;
Conference_Titel :
Silicon Monolithic Integrated Circuits in RF Systems, 2003. Digest of Papers. 2003 Topical Meeting on
Conference_Location :
Grainau, Germany
Print_ISBN :
0-7803-7787-7
DOI :
10.1109/SMIC.2003.1196699
