Title :
18th IEEE International Conference on Micro Electro Mechanical Systems (IEEE Cat. No.05CH37610)
fDate :
Jan. 30 2005-Feb. 3 2005
Abstract :
The following topics are dealt with: microfabrication; MEMS packaging; MEMS fabrication; MEMS materials; MEMS self-assembly; RF MEMS; pneumatic/jet systems; optical microsystems; physical microsystems; microactuators; polymer MEMS; bio MEMS; bioanalytical systems; microfluidics and nanosystems.
Keywords :
biomedical equipment; micro-optics; microactuators; microfluidics; micromechanical devices; nanotechnology; packaging; pneumatic systems; MEMS fabrication; MEMS materials; MEMS packaging; MEMS self-assembly; RF MEMS; bio MEMS; bioanalytical systems; jet systems; microactuators; microfabrication; nanosystems; optical microsystems; physical microsystems; pneumatic systems; polymer MEMS;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Conference_Location :
Miami Beach, FL, USA
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453842
