Thin film magnetostrictive sensor with on-chip readout and attoFarad capacitance resolution

Author

Lu, Y. ; Nathan, A. ; Manku, T. ; Ning, Y.

Author_Institution

Dept. of Electr. & Comput. Eng., Waterloo Univ., Ont., Canada

fYear

1996

fDate

8-11 Dec. 1996

Firstpage

777

Lastpage

780

Abstract

We report the first successful integration of magnetostrictive Metglas (Fe/sub 78/Si/sub 9/B/sub 13/) thin film sensor with a readout circuit using standard integrated circuit (IC) process and surface micromachining. The Metglas thin film is on a nitride cantilever beam. Its magnetic domains are subject to rotation in a magnetic field. This induces a strain and hence, beam deflection which is measured through capacitive change using a charge coupling readout scheme with aF capacitance resolution.

Keywords

amorphous magnetic materials; capacitance measurement; magnetic domains; magnetic sensors; magnetic thin film devices; magnetostrictive devices; metallic glasses; micromachining; microsensors; Fe/sub 78/Si/sub 9/B/sub 13/; Metglas; attofarad capacitance resolution; beam deflection; charge coupling; integrated circuit process; magnetic domains; nitride cantilever beam; on-chip readout; strain; surface micromachining; thin film magnetostrictive sensor; Amorphous magnetic materials; Capacitance; Capacitive sensors; Magnetic domains; Magnetic field induced strain; Magnetic field measurement; Magnetic sensors; Magnetostriction; Thin film circuits; Thin film sensors;

fLanguage

English

Publisher

ieee

Conference_Titel

Electron Devices Meeting, 1996. IEDM '96., International

Conference_Location

San Francisco, CA, USA

ISSN

0163-1918

Print_ISBN

0-7803-3393-4

Type

conf

DOI

10.1109/IEDM.1996.554095

Filename

554095