Silicon micromachining and high speed gas chromatography

Through the use of silicon micromachining, micron dimensional features have been photolithographically patterned and subsequently etched and bonded to generate three-dimensional silicon microstructures which are incorporated into the world´s smallest and fastest gas chromatograph (GC). The micromachined devices of the GC provide the only commercially available components which can match the enhanced performance efficiency of the microbore (i.e., ⩽100 μm) fused silica capillary columns. It is noted that the resulting high-speed micro-GC offers a multitude of features and advantages over conventional GCs. High-speed chemical separations (analyses requiring less than 120 s) can now be realized with the interfacing of silicon micromachined components and the commercially available microbore chromatographic columns. The authors describe device fabrication, specifications, and performance, as well as current and projected future applications of silicon micromachining in gas chromatography