Title :
Cryogenic imaging x-ray spectrometer
Author :
Wiegerink, R.J. ; van Baar, J.J. ; de Boer, J.H. ; Ridder, M.L. ; Bruijn, M.P. ; Germeau, A. ; Hoevers, H.F.C.
Author_Institution :
MESA+ Inst., Twente Univ., Enschede, Netherlands
fDate :
30 Jan.-3 Feb. 2005
Abstract :
A micro-calorimeter array consisting of superconducting transition-edge sensors is under development for the X-ray imaging spectrometer on board of ESA´s XEUS (X-ray Evolving Universe Spectroscopy) mission. An array of 32 × 32 pixels with a pixel size of 250 micron square is envisaged. So far, 5 × 5 pixels arrays were successfully fabricated along two fabrication routes: a bulk micromachining and a surface micromachining route. Both routes result in working arrays with energy resolutions down to 5 eV FWHM for the best pixels.
Keywords :
X-ray imaging; X-ray spectrometers; calorimeters; image sensors; micromachining; superconducting transitions; 1024 pixels; 25 pixels; X-ray Evolving Universe Spectroscopy; XEUS mission; bulk micromachining; cryogenic imaging X-ray spectrometer; microcalorimeter array; superconducting transition-edge sensors; surface micromachining; Cryogenics; Energy resolution; Micromachining; Optical imaging; Optoelectronic and photonic sensors; SQUIDs; Sensor arrays; Spectroscopy; Voltage; X-ray imaging;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453866
