Self-aligned vertical electrostatic comb drives for scanning micromirrors

Author

Tsou, C. ; Lin, T. ; Fan, C.C. ; Chou, Bruce C S

Author_Institution

Dept. of Autom. Control Eng., Feng Chia Univ., Taichung, Taiwan

fYear

2005

fDate

30 Jan.-3 Feb. 2005

Firstpage

72

Lastpage

75

Abstract

A novel method for fabricating a self-aligned electrostatic dual comb drive using a multi-layer SOI process has been developed. The present method utilizes four aligned masks greatly simplifying the existing SOI-MEMS fabrication methods for manufacturing high performance scanning micromirrors. Results from the micromirror device for the novel vertical comb drives show that a mechanical tilt angle of ±1° at 100 V_DC was achieved for a 450 μm diameter micromirror. The scanning micromirror can scan a large angle 62° at the resonance frequency of 10.46 KHz with a sinusoidal voltage input of 60 V in amplitude.

Keywords

micromirrors; optical fabrication; silicon-on-insulator; 10.46 KHz; 450 micron; 60 V; SOI-MEMS fabrication methods; aligned masks; electrostatic comb drives; multilayer SOI process; scanning micromirrors; self-aligned vertical comb drives; Actuators; Electrodes; Electrostatics; Fabrication; Fingers; Insulation; Microactuators; Micromirrors; Optical attenuators; Voltage;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-8732-5

Type

conf

DOI

10.1109/MEMSYS.2005.1453870

Filename

1453870