Title :
MEMS millimeterwave components
Author :
Jung-Chih Chiao ; Yiton Fu ; Choudhury, D. ; Lih-Yuan Lin
Author_Institution :
Dept. of Electr. Eng., Hawaii Univ., Honolulu, HI, USA
Abstract :
New microelectromechanical system (MEMS) components that enable reconfigurable MEMS millimeterwave transceivers were presented with a focus on the device architectures for system integration. The architectures for reconfigurable antennas, planar impedance tuners, microswitches and variable capacitors were demonstrated using the three-polysilicon-layer process.
Keywords :
elemental semiconductors; micromechanical devices; microwave switches; millimetre wave antennas; millimetre wave devices; silicon; transceivers; tuning; MEMS millimeterwave components; device architectures; microelectromechanical system components; microswitches; planar impedance tuners; reconfigurable antennas; reconfigurable millimeterwave transceivers; system integration; three-polysilicon-layer process; variable capacitors; Dielectric losses; Dielectric materials; Dielectric substrates; Impedance; Laboratories; Micromechanical devices; Q factor; Switches; Transceivers; Tuners;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.779802
