Title :
Photonic crystal tuned by cantilever
Author :
Takahata, Tomoyuki ; Hoshino, Kazunori ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution :
Dept. of Mechano-Informatics, Tokyo Univ., Japan
fDate :
30 Jan.-3 Feb. 2005
Abstract :
The purpose of our research is to tune two-dimensional (2D) slab photonic crystal (PhC) reflectors by inserting an AFM cantilever into one of the air holes. The 2D slab PhCs have column-shaped air holes on the triangular lattice in silicon air-bridge waveguide. The PhCs act as optical reflectors because of their photonic band gap. First, we estimated the effect of the cantilever insertion on the transmittance of the PhC reflectors with the finite difference time domain (FDTD) method. Then, we fabricated PhC reflectors by electron beam (EB) lithography and DRIE. Finally, we inserted the cantilever into one of their air holes. The transmittance with the cantilever was about twice as large as the original transmittance. The results proved that we could tune the transmittance of the PhC reflectors.
Keywords :
electron beam lithography; finite difference time-domain analysis; optical tuning; optical waveguides; photonic crystals; sputter etching; 2D slab photonic crystal reflectors; AFM cantilever; PhC reflectors; air holes; deep reactive ion etching; electron beam lithography; finite difference time domain method; optical reflectors; photonic band gap; silicon air-bridge waveguide; triangular lattice; Electron beams; Electron optics; Finite difference methods; Lattices; Optical waveguides; Photonic band gap; Photonic crystals; Silicon; Slabs; Time domain analysis;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453880
