Title :
Integration of a novel electrochemical tuning scheme with MEMS surface micromachined resonators
Author :
Enderling, S. ; Brown, C.L., III ; Balakrishnan, M. ; Hedley, J. ; Stevenson, J.T.M. ; Bond, S. ; Dunare, C.C. ; Harris, A.J. ; Burdess, J.S. ; Mitkova, M. ; Kozicki, M.N. ; Walton, A.J.
Author_Institution :
Scottish Microelectron. Centre, Edinburgh Univ., UK
fDate :
30 Jan.-3 Feb. 2005
Abstract :
A novel, fully functional silver (Ag) electrodeposition process has been integrated into surface micromachined polysilicon resonators for the purpose of resonant frequency tuning. Application of different DC tuning voltages between a Ag anode and inert aluminium cathodes caused frequency changes ranging from -10% to 10.7%. This process presents a promising technique for dynamic in-situ, low voltage frequency tuning to the field of RF MEMS.
Keywords :
circuit tuning; electrochemistry; electrodeposition; micromachining; micromechanical resonators; silver; Ag; DC tuning voltages; MEMS surface micromachined resonators; RF MEMS; electrochemical tuning scheme; inert aluminium cathodes; low voltage frequency tuning; polysilicon resonators; resonant frequency tuning; silver electrodeposition process; Aluminum; Annealing; Anodes; Bonding; Bridge circuits; Cathodes; Micromechanical devices; Resonant frequency; Tuning; Voltage;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453891
