Title :
Room temperature thin film Ba/sub x/Sr/sub 1-x/TiO/sub 3/ Ku-band coupled microstrip phase shifters: effects of film thickness, doping, annealing and substrate choice
Author :
Van Keuls, F.W. ; Mueller, C.H. ; Miranda, F.A. ; Romanofsky, R.R. ; Canedy, C.L. ; Aggarwal, Suhas ; Venkatesan, Thirumalai ; Ramesh, Ramaswamy ; Horwitz, J.S. ; Chang, W. ; Kim, W.J.
Author_Institution :
NASA Lewis Res. Center, Cleveland, OH, USA
Abstract :
We report on measurements taken on thirteen Ku-band coupled microstrip phase shifters (CMPS) using thin ferroelectric films of Ba/sub x/Sr/sub 1-x/TiO/sub 3/. This CMPS design is a recent innovation designed to take advantage of the high tunability and tolerate the high dielectric constant of ferroelectric films at Ku- and K-band frequencies. These devices are envisioned as a component in low-cost steerable beam phased array antennas. Comparisons are made between devices with differing film thickness, annealed vs. unannealed, Mn-doped vs. undoped, and also substrates of LaAlO/sub 3/ and MgO.
Keywords :
annealing; antenna phased arrays; barium compounds; ferroelectric thin films; microstrip components; microwave phase shifters; permittivity; strontium compounds; BaSrTiO/sub 3/; Ku-band; annealing; coupled microstrip phase shifters; dielectric constant; ferroelectric films; film thickness; steerable beam phased array antennas; tunability; Ferroelectric films; High-K gate dielectrics; Microstrip; Phase measurement; Phase shifters; Phased arrays; Strontium; Technological innovation; Temperature; Transistors;
Conference_Titel :
Microwave Symposium Digest, 1999 IEEE MTT-S International
Conference_Location :
Anaheim, CA, USA
Print_ISBN :
0-7803-5135-5
DOI :
10.1109/MWSYM.1999.779865
