Title :
Proposal of new type of micro-machined quartz tuning fork AFM probe
Author :
Hida, Hirotaka ; Fukuzawa, Kenji ; Di Cheng ; Sato, Kiminori ; Shikida, Mitsuhiro ; Ono, Atsushi ; Sato, Kiminori ; Asaumi, K. ; Iriye, Y.
Author_Institution :
Dept. of Micro-Nano Syst. Eng., Nagoya Univ., Japan
fDate :
30 Jan.-3 Feb. 2005
Abstract :
A quartz probe structure with a monolithically integrated tuning fork with a sharp tip at the end has been developed for application to noncontact atomic force microscopy (AFM) systems. The structure is fabricated using quartz micromachining technologies. Evaluation of the properties of a fabricated quartz tuning fork showed that it had a Q-factor of 2348, a resonant frequency of 39.92 kHz, and amplitude of 2.69 μm. It would thus have atomic-level resolution in an AFM system.
Keywords :
Q-factor; atomic force microscopy; micromachining; probes; quartz; 39.92 KHz; AFM probe; Q-factor; monolithically integrated tuning fork; noncontact atomic force microscopy; quartz micromachining; quartz probe structure; quartz tuning fork; resonant frequency; Atomic force microscopy; Electrodes; Image resolution; Micromechanical devices; Optical sensors; Optical tuning; Probes; Proposals; Q factor; Vibrations;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453932
