Title :
Microfabricated spherical biconvex quartz crystal microbalance array
Author :
Li, Li ; Abe, Takashi ; Esashi, Masayoshi
Author_Institution :
Graduate Sch. of Eng., Tohoku Univ., Japan
fDate :
30 Jan.-3 Feb. 2005
Abstract :
A miniaturized spherical bi-convex quartz crystal microbalance (QCM) array was fabricated by reactive ion etching (RIE) and photoresist reflow with solvent vapor technology. The spherical convex shape is necessary to suppress a spurious mode and obtain a high Q factor. Not only can the large-radius spherical convex shape be achieved by this technology, but also miniaturization and batch fabrication. The Q factor of the fabricated QCM (80000) is two times higher than that of the planar QCM, and the spurious mode around the fundamental vibration mode is suppressed very well. It also has superior resonant characteristic under the viscoelastic liquid.
Keywords :
Q-factor; microbalances; photoresists; quartz; reflow soldering; sputter etching; Q factor; batch fabrication; miniaturization; photoresist reflow; reactive ion etching; resonant characteristic; solvent vapor technology; spherical biconvex quartz crystal microbalance array; viscoelastic liquid; Electrodes; Etching; Fabrication; Optical arrays; Optical microscopy; Optical resonators; Q factor; Resists; Shape; Solvents;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453933
