Title :
Microfabricated finger-QCM array for ultrahigh sensitive gravimetry
Author :
Li, Li ; Abe, Takashi ; Esashi, Masuyoshi
Author_Institution :
Graduate Sch. of Eng., Tohoku Univ., Japan
fDate :
30 Jan.-3 Feb. 2005
Abstract :
A miniaturized finger quartz crystal microbalance (QCM) array was fabricated by smooth surface deep-reactive-ion etching (deep-RlE) technology and transparent quartz glass stencil mask with two-level plane for alignment. The finger-QCM array was designed by reducing the support loss and the fixed part of it was made small compared with conventional inverted-mesa QCM. The Q factor of the finger QCM array is about 16000 for 52.1 MHz with 1 mm-electrode and 22000 for 41.7 MHz with 0.5mm-electrode. The Q factor of the finger-QCM is above 5 and 44 times greater than that of the inverted-mesa QCM at the same frequency and electrode diameter, respectively.
Keywords :
Q-factor; density measurement; microbalances; quartz; small electric machines; sputter etching; 0.5 mm; 1 mm; 41.7 MHz; 52.1 MHz; deep-reactive-ion etching; finger-QCM array; inverted-mesa QCM; quartz crystal microbalance array; smooth surface; stencil mask; ultrahigh sensitive gravimetry; Biosensors; Electrodes; Energy dissipation; Fingers; Glass; Optical arrays; Optical microscopy; Q factor; Resonant frequency; Stability;
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
Print_ISBN :
0-7803-8732-5
DOI :
10.1109/MEMSYS.2005.1453934
