DocumentCode :
3422410
Title :
Piezoelectric bfmorph transducers based on single crystal AL0.3Ga0.7AS films
Author :
Li, L. ; Kumar, P. ; Calhoun, L. ; DeVoe, D.L.
fYear :
2005
fDate :
30 Jan.-3 Feb. 2005
Firstpage :
379
Lastpage :
382
Keywords :
Electrodes; Fabrication; Microactuators; Molecular beam epitaxial growth; Piezoelectric actuators; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Resonance; Substrates;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
ISSN :
1084-6999
Print_ISBN :
0-7803-8732-5
Type :
conf
DOI :
10.1109/MEMSYS.2005.1453946
Filename :
1453946
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3422410
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