• DocumentCode
    3422410
  • Title

    Piezoelectric bfmorph transducers based on single crystal AL0.3Ga0.7AS films

  • Author

    Li, L. ; Kumar, P. ; Calhoun, L. ; DeVoe, D.L.

  • fYear
    2005
  • fDate
    30 Jan.-3 Feb. 2005
  • Firstpage
    379
  • Lastpage
    382
  • Keywords
    Electrodes; Fabrication; Microactuators; Molecular beam epitaxial growth; Piezoelectric actuators; Piezoelectric films; Piezoelectric materials; Piezoelectric transducers; Resonance; Substrates;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on
  • ISSN
    1084-6999
  • Print_ISBN
    0-7803-8732-5
  • Type

    conf

  • DOI
    10.1109/MEMSYS.2005.1453946
  • Filename
    1453946
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3422410